JPH0733855Y2 - クリーンルームの天井フィルター装置 - Google Patents

クリーンルームの天井フィルター装置

Info

Publication number
JPH0733855Y2
JPH0733855Y2 JP12098990U JP12098990U JPH0733855Y2 JP H0733855 Y2 JPH0733855 Y2 JP H0733855Y2 JP 12098990 U JP12098990 U JP 12098990U JP 12098990 U JP12098990 U JP 12098990U JP H0733855 Y2 JPH0733855 Y2 JP H0733855Y2
Authority
JP
Japan
Prior art keywords
filter
clean room
shutter
shutter plate
fixing member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP12098990U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0478921U (en]
Inventor
允和 山形
輝昭 赤尾
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sanki Engineering Co Ltd
Original Assignee
Sanki Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sanki Engineering Co Ltd filed Critical Sanki Engineering Co Ltd
Priority to JP12098990U priority Critical patent/JPH0733855Y2/ja
Publication of JPH0478921U publication Critical patent/JPH0478921U/ja
Application granted granted Critical
Publication of JPH0733855Y2 publication Critical patent/JPH0733855Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)
JP12098990U 1990-11-19 1990-11-19 クリーンルームの天井フィルター装置 Expired - Lifetime JPH0733855Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12098990U JPH0733855Y2 (ja) 1990-11-19 1990-11-19 クリーンルームの天井フィルター装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12098990U JPH0733855Y2 (ja) 1990-11-19 1990-11-19 クリーンルームの天井フィルター装置

Publications (2)

Publication Number Publication Date
JPH0478921U JPH0478921U (en]) 1992-07-09
JPH0733855Y2 true JPH0733855Y2 (ja) 1995-08-02

Family

ID=31868868

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12098990U Expired - Lifetime JPH0733855Y2 (ja) 1990-11-19 1990-11-19 クリーンルームの天井フィルター装置

Country Status (1)

Country Link
JP (1) JPH0733855Y2 (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5007785B2 (ja) * 2006-03-27 2012-08-22 株式会社湯山製作所 清浄環境維持機能付きキャビネット

Also Published As

Publication number Publication date
JPH0478921U (en]) 1992-07-09

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Legal Events

Date Code Title Description
R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

EXPY Cancellation because of completion of term