JPH0733855Y2 - クリーンルームの天井フィルター装置 - Google Patents
クリーンルームの天井フィルター装置Info
- Publication number
- JPH0733855Y2 JPH0733855Y2 JP12098990U JP12098990U JPH0733855Y2 JP H0733855 Y2 JPH0733855 Y2 JP H0733855Y2 JP 12098990 U JP12098990 U JP 12098990U JP 12098990 U JP12098990 U JP 12098990U JP H0733855 Y2 JPH0733855 Y2 JP H0733855Y2
- Authority
- JP
- Japan
- Prior art keywords
- filter
- clean room
- shutter
- shutter plate
- fixing member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000007664 blowing Methods 0.000 description 25
- 238000004519 manufacturing process Methods 0.000 description 18
- 229910000831 Steel Inorganic materials 0.000 description 2
- 230000003749 cleanliness Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000945 filler Substances 0.000 description 2
- 230000037431 insertion Effects 0.000 description 2
- 238000003780 insertion Methods 0.000 description 2
- 238000004080 punching Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
Landscapes
- Ventilation (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12098990U JPH0733855Y2 (ja) | 1990-11-19 | 1990-11-19 | クリーンルームの天井フィルター装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12098990U JPH0733855Y2 (ja) | 1990-11-19 | 1990-11-19 | クリーンルームの天井フィルター装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0478921U JPH0478921U (en]) | 1992-07-09 |
JPH0733855Y2 true JPH0733855Y2 (ja) | 1995-08-02 |
Family
ID=31868868
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12098990U Expired - Lifetime JPH0733855Y2 (ja) | 1990-11-19 | 1990-11-19 | クリーンルームの天井フィルター装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0733855Y2 (en]) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5007785B2 (ja) * | 2006-03-27 | 2012-08-22 | 株式会社湯山製作所 | 清浄環境維持機能付きキャビネット |
-
1990
- 1990-11-19 JP JP12098990U patent/JPH0733855Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH0478921U (en]) | 1992-07-09 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
EXPY | Cancellation because of completion of term |